Fishbone Electrostatic Comb Drive Actuator

This invention is concerned with electrostatic actuators which contain comb drivers and can be adapted for a variety of applications. The comb driver has two electrodes each connected to a set of comb fingers. The two set of comb fingers interdigitated with each other, and in one embodiment each has a fish bone geometry shape. One electrode is connected to a spring structure and movable along horizontal direct ion to engage and disengage the two set of comb fingers. The movable portion is adapted to perform an actuation function with high electrostatic force density. The geometrical manipulation of the electrostatic comb drive fingers are disclosed in this application.