TECH OFFER
A Powder-Based Target Physical Vapor Deposition Apparatus
TECHNOLOGY OVERVIEW
The present invention relates to a physical vapour deposition apparatus for depositing substantially uniform coatings on a substrate, comprising: a deposition chamber; a rotary shaft disposed at centre of said deposition chamber; a substrate holder coupled to the rotary shaft, for holding the substrate; a heater coupled to the rotary shaft above the substrate holder, for heating the substrate; a magnetron assembly for sputtering of electron ions on a deposit; a pump, for generating and providing a vacuum-like atmosphere in the physical vapour deposition apparatus; and characterised by: a shutter positioned above the magnetron assembly for controlling exposure of a coating material to an ion bombardment; the magnetron assembly comprises of a first magnet stack positioned in centre of said magnetron assembly; a second magnet stack positioned at periphery of said magnetron for enhancing electrons during deposition; a cooling block; an insulator; and a power supply means.
Contact person for this offer:
ChM Dr. Lee Ching Shya, PhD (Dual), RTTP
Technology Transfer Manager
Email: leecs@um.edu.my
Tel: +603-7967-7351/ 013-2250151
![](https://static.wixstatic.com/media/a08a0f_7e03838237954a7597ae5996c1a193c2~mv2.jpg/v1/fill/w_980,h_653,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/a08a0f_7e03838237954a7597ae5996c1a193c2~mv2.jpg)
![](https://static.wixstatic.com/media/a08a0f_7e03838237954a7597ae5996c1a193c2~mv2.jpg/v1/fill/w_980,h_653,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/a08a0f_7e03838237954a7597ae5996c1a193c2~mv2.jpg)
MORE INFORMATION
You have a question to know about technologies or cooperations?
Please Contact Us:
![](https://static.wixstatic.com/media/035244_84bf70a186044233b6d73970eb010512~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_84bf70a186044233b6d73970eb010512~mv2.png)
![](https://static.wixstatic.com/media/035244_6baafa34ad22400fb8be751380550043~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_6baafa34ad22400fb8be751380550043~mv2.png)
![](https://static.wixstatic.com/media/035244_84bf70a186044233b6d73970eb010512~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_84bf70a186044233b6d73970eb010512~mv2.png)
+603 - 7967 7351 / 013-2250151
![](https://static.wixstatic.com/media/035244_bf267eff84f848c29f2231fa52e63885~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_bf267eff84f848c29f2231fa52e63885~mv2.png)
![](https://static.wixstatic.com/media/035244_0e50331439b1443d89559c1a252e012b~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_0e50331439b1443d89559c1a252e012b~mv2.png)
![](https://static.wixstatic.com/media/035244_bf267eff84f848c29f2231fa52e63885~mv2.png/v1/fill/w_30,h_30,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/035244_bf267eff84f848c29f2231fa52e63885~mv2.png)